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Effect of Adsorption Stress-Induced Change in Neutral Layer Position on Static Behavior of Microcantilever Gas Sensor
Effect of Adsorption Stress-Induced Change in Neutral Layer Position on Static Behavior of Microcantilever Gas Sensor
Effect of Adsorption Stress-Induced Change in Neutral Layer Position on Static Behavior of Microcantilever Gas Sensor
Wang, F. (author) / Zhao, L. (author) / Zhang, Y.L. (author) / Jing, D.L. (author) / Tang, F.
2013-01-01
8 pages
Article (Journal)
English
DDC:
620.11
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