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Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending
Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending
Analysis of an Electrostatic Micro-Actuator Based on Vertically-Horizontally Bending
Tian, W.C. (author) / Yang, Y.T. (author) / Tang, F.
2013-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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