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Performance Comparison of Typical Electrothermal Actuators

Zhou, L. / Shen, X.J. / Wang, Z.L. / Hu, Y.

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Performance Comparison of Typical Electrothermal Actuators

Zhou, L. / Shen, X.J. / Wang, Z.L. / Hu, Y.

Performance Comparison of Typical Electrothermal Actuators

Zhou, L. / Shen, X.J. / Wang, Z.L. / Hu, Y.

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Document information

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Document information

Title:

Performance Comparison of Typical Electrothermal Actuators

Contributors:

Zhou, L. (author) / Shen, X.J. (author) / Wang, Z.L. (author) / Hu, Y. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 528-533

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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