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Research on Improving the Measurement Accuracy of Laser Interferometer System

Wang, X.Z. / Zhou, H. / Zhai, Z.S.

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Research on Improving the Measurement Accuracy of Laser Interferometer System

Wang, X.Z. / Zhou, H. / Zhai, Z.S.

Research on Improving the Measurement Accuracy of Laser Interferometer System

Wang, X.Z. / Zhou, H. / Zhai, Z.S.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Research on Improving the Measurement Accuracy of Laser Interferometer System

Contributors:

Wang, X.Z. (author) / Zhou, H. (author) / Zhai, Z.S. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 1021-1026

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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