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Modeling of Ultra-Precision Piezodriven Positioning System

Chen, H. / Tan, Y.H. / Zhou, X.P. / Zhang, Y.H. / Dong, R.L.

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Modeling of Ultra-Precision Piezodriven Positioning System

Chen, H. / Tan, Y.H. / Zhou, X.P. / Zhang, Y.H. / Dong, R.L.

Modeling of Ultra-Precision Piezodriven Positioning System

Chen, H. / Tan, Y.H. / Zhou, X.P. / Zhang, Y.H. / Dong, R.L.

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Document information

Title:

Modeling of Ultra-Precision Piezodriven Positioning System

Contributors:

Chen, H. (author) / Tan, Y.H. (author) / Zhou, X.P. (author) / Zhang, Y.H. (author) / Dong, R.L. (author) / Tang, F.

Published in:

Micro-Nano Technology XIV ; 1504-1509

KEY ENGINEERING MATERIALS ; 562/565

Publication date:

2013-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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