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Nanoscale friction and wear properties of silicon wafer under different lubrication conditions
Nanoscale friction and wear properties of silicon wafer under different lubrication conditions
Nanoscale friction and wear properties of silicon wafer under different lubrication conditions
APPLIED SURFACE SCIENCE ; 282 ; 25-31
2013-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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