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Direct modification of silicon surface by nanosecond laser interference lithography

Wang, D. / Wang, Z. / Zhang, Z. / Yue, Y. / Li, D. / Maple, C.

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Direct modification of silicon surface by nanosecond laser interference lithography

Wang, D. / Wang, Z. / Zhang, Z. / Yue, Y. / Li, D. / Maple, C.

Direct modification of silicon surface by nanosecond laser interference lithography

Wang, D. / Wang, Z. / Zhang, Z. / Yue, Y. / Li, D. / Maple, C.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Direct modification of silicon surface by nanosecond laser interference lithography

Contributors:

Wang, D. (author) / Wang, Z. (author) / Zhang, Z. (author) / Yue, Y. (author) / Li, D. (author) / Maple, C. (author)

Published in:

APPLIED SURFACE SCIENCE ; 282 ; 67-72

Publication date:

2013-01-01

Size:

6 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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