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    TiN/TiCN multilayer films modified by argon plasma treatment

    New search for: Zheng, J.
    New search for: Hao, J.
    New search for: Liu, X.
    New search for: Gong, Q.
    New search for: Liu, W.

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    TiN/TiCN multilayer films modified by argon plasma treatment

    New search for: Zheng, J.
    New search for: Hao, J.
    New search for: Liu, X.
    New search for: Gong, Q.
    New search for: Liu, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    TiN/TiCN multilayer films modified by argon plasma treatment

    New search for: Zheng, J.
    New search for: Hao, J.
    New search for: Liu, X.
    New search for: Gong, Q.
    New search for: Liu, W.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    TiN/TiCN multilayer films modified by argon plasma treatment

    Contributors:

    Zheng, J. (author) / Hao, J. (author) / Liu, X. (author) / Gong, Q. (author) / Liu, W. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 282 ; 764-771

    Publication date:

    2013-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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