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    RIR MAPLE procedure for deposition of carbon rich Si/C/H films

    New search for: Drinek, V.
    New search for: Strasak, T.
    New search for: Novotny, F.
    New search for: Fajgar, R.
    New search for: Bastl, Z.

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    RIR MAPLE procedure for deposition of carbon rich Si/C/H films

    New search for: Drinek, V.
    New search for: Strasak, T.
    New search for: Novotny, F.
    New search for: Fajgar, R.
    New search for: Bastl, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    RIR MAPLE procedure for deposition of carbon rich Si/C/H films

    New search for: Drinek, V.
    New search for: Strasak, T.
    New search for: Novotny, F.
    New search for: Fajgar, R.
    New search for: Bastl, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    RIR MAPLE procedure for deposition of carbon rich Si/C/H films

    Contributors:

    Drinek, V. (author) / Strasak, T. (author) / Novotny, F. (author) / Fajgar, R. (author) / Bastl, Z. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 292 ; 413-419

    Publication date:

    2014-01-01

    Size:

    7 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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