Nanostructured plasma etched, magnetron sputtered nanolaminar Cr"2AlC MAX phase thin films: Fid-Bau Portal

Nanostructured plasma etched, magnetron sputtered nanolaminar Cr"2AlC MAX phase thin films

Grieseler, R. / Hahnlein, B. / Stubenrauch, M. / Kups, T. / Wilke, M. / Hopfeld, M. / Pezoldt, J. / Schaaf, P.

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Nanostructured plasma etched, magnetron sputtered nanolaminar Cr"2AlC MAX phase thin films

Grieseler, R. / Hahnlein, B. / Stubenrauch, M. / Kups, T. / Wilke, M. / Hopfeld, M. / Pezoldt, J. / Schaaf, P.

Nanostructured plasma etched, magnetron sputtered nanolaminar Cr"2AlC MAX phase thin films

Grieseler, R. / Hahnlein, B. / Stubenrauch, M. / Kups, T. / Wilke, M. / Hopfeld, M. / Pezoldt, J. / Schaaf, P.

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Document information

Title:

Nanostructured plasma etched, magnetron sputtered nanolaminar Cr"2AlC MAX phase thin films

Contributors:

Grieseler, R. (author) / Hahnlein, B. (author) / Stubenrauch, M. (author) / Kups, T. (author) / Wilke, M. (author) / Hopfeld, M. (author) / Pezoldt, J. (author) / Schaaf, P. (author)

Published in:

APPLIED SURFACE SCIENCE ; 292 ; 997-1001

Publication date:

2014-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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