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    Formation of zirconium silicide between silicon substrate and zirconium films

    New search for: Liu, W.
    New search for: Liang, J.
    New search for: Zhou, X.
    New search for: Long, X.

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    Formation of zirconium silicide between silicon substrate and zirconium films

    New search for: Liu, W.
    New search for: Liang, J.
    New search for: Zhou, X.
    New search for: Long, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Formation of zirconium silicide between silicon substrate and zirconium films

    New search for: Liu, W.
    New search for: Liang, J.
    New search for: Zhou, X.
    New search for: Long, X.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Formation of zirconium silicide between silicon substrate and zirconium films

    Contributors:

    Liu, W. (author) / Liang, J. (author) / Zhou, X. (author) / Long, X. (author)

    Published in:

    MATERIALS LETTERS ; 122 ; 220-222

    Publication date:

    2014-01-01

    Size:

    3 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.1105 / 530

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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