Fachinformationsdienst BAUdigital

A platform for research: civil engineering, architecture and urbanism

    Preparation and Characterization of Nitridation Layer on 4H SiC (0001) Surface by Direct Plasma Nitridation

    New search for: Akahane, Y.
    New search for: Kano, T.
    New search for: Kimura, K.
    New search for: Komatsu, H.
    New search for: Watanabe, Y.
    New search for: Yamakami, T.
    New search for: Kamimura, K.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Preparation and Characterization of Nitridation Layer on 4H SiC (0001) Surface by Direct Plasma Nitridation

    New search for: Akahane, Y.
    New search for: Kano, T.
    New search for: Kimura, K.
    New search for: Komatsu, H.
    New search for: Watanabe, Y.
    New search for: Yamakami, T.
    New search for: Kamimura, K.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Preparation and Characterization of Nitridation Layer on 4H SiC (0001) Surface by Direct Plasma Nitridation

    New search for: Akahane, Y.
    New search for: Kano, T.
    New search for: Kimura, K.
    New search for: Komatsu, H.
    New search for: Watanabe, Y.
    New search for: Yamakami, T.
    New search for: Kamimura, K.
    New search for: Okumura, H.
    New search for: Harima, H.
    New search for: Kimoto, T.
    New search for: Yoshimoto, M.
    New search for: Watanabe, H.
    New search for: Hatayama, T.
    New search for: Matsuura, H.
    New search for: Funaki, T.
    New search for: Sano, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Preparation and Characterization of Nitridation Layer on 4H SiC (0001) Surface by Direct Plasma Nitridation

    Contributors:

    Akahane, Y. (author) / Kano, T. (author) / Kimura, K. (author) / Komatsu, H. (author) / Watanabe, Y. (author) / Yamakami, T. (author) / Kamimura, K. (author) / Okumura, H. / Harima, H. / Kimoto, T.

    Published in:

    Silicon Carbide and Related Materials 2013 PART 1 Selected, peer reviewed papers from the 15^t^h International Conference on Silicon Carbide and Related Materials, (ICSCRM 2013), September 29 - October 4, 2013, Miyazaki, Japan ; 631-634

    MATERIALS SCIENCE FORUM ; 778/780

    Publication date:

    2014-01-01

    Size:

    4 pages

    ISSN:

    0255-5476

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

    Similar titles

    Preparation of lutetium nitride by direct nitridation

    Suehiro, T. / Hirosaki, N. / Yamamoto, Y. et al. | British Library Online Contents | 2004

    GaN nucleation on (0001)-sapphire via ion-induced nitridation of gallium

    Sidorenko, A. / Peisert, H. / Neumann, H. et al. | British Library Online Contents | 2006

    Improved nitridation efficiency and mechanical property of stainless steel surface after N2-H2 plasma nitridation at low temperature

    Marot, L. / Le Bourhis, E. / Straboni, A. | British Library Online Contents | 2002

    Preparation and nitridation of silicon whiskers

    Gopalakrishnan, P. S. / Lakshminarasimham, P. S. | British Library Online Contents | 1995

    Chromium catalysed silicon nitridation

    Cofer, C. G. / Lewis, J. A. | British Library Online Contents | 1994

    Back to top