Fabrication of Electrostatically Actuated 4H-SiC Microcantilever Resonators by Using n/p/n Epitaxial Structures and Doping-Selective Electrochemical Etching: Fid-Bau Portal

Fabrication of Electrostatically Actuated 4H-SiC Microcantilever Resonators by Using n/p/n Epitaxial Structures and Doping-Selective Electrochemical Etching

Sato, K. / Adachi, K. / Okamoto, H. / Yamaguchi, H. / Kimoto, T. / Suda, J.

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Fabrication of Electrostatically Actuated 4H-SiC Microcantilever Resonators by Using n/p/n Epitaxial Structures and Doping-Selective Electrochemical Etching

Sato, K. / Adachi, K. / Okamoto, H. / Yamaguchi, H. / Kimoto, T. / Suda, J.

Fabrication of Electrostatically Actuated 4H-SiC Microcantilever Resonators by Using n/p/n Epitaxial Structures and Doping-Selective Electrochemical Etching

Sato, K. / Adachi, K. / Okamoto, H. / Yamaguchi, H. / Kimoto, T. / Suda, J.

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Title:

Fabrication of Electrostatically Actuated 4H-SiC Microcantilever Resonators by Using n/p/n Epitaxial Structures and Doping-Selective Electrochemical Etching

Contributors:

Sato, K. (author) / Adachi, K. (author) / Okamoto, H. (author) / Yamaguchi, H. (author) / Kimoto, T. (author) / Suda, J. (author) / Okumura, H. / Harima, H. / Kimoto, T. / Yoshimoto, M.