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From crater eruption to surface purification of raw silicon: A treatment by pulsed electron beam

Gao, Y. / Qin, Y. / Dong, C. / Li, G.

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From crater eruption to surface purification of raw silicon: A treatment by pulsed electron beam

Gao, Y. / Qin, Y. / Dong, C. / Li, G.

From crater eruption to surface purification of raw silicon: A treatment by pulsed electron beam

Gao, Y. / Qin, Y. / Dong, C. / Li, G.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

From crater eruption to surface purification of raw silicon: A treatment by pulsed electron beam

Contributors:

Gao, Y. (author) / Qin, Y. (author) / Dong, C. (author) / Li, G. (author)

Published in:

APPLIED SURFACE SCIENCE ; 311 ; 413-421

Publication date:

2014-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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