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    Growth of AlN Films on Silicon Substrates by Radio Frequency Magnetron Sputtering

    New search for: Huang, J.
    New search for: Tang, K.
    New search for: Yang, H.M.
    New search for: Lin, M.A.
    New search for: Zhang, L.
    New search for: Ren, B.
    New search for: Xu, H.T.
    New search for: Wang, L.J.
    New search for: Pan, W.
    New search for: Gong, J.

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    Growth of AlN Films on Silicon Substrates by Radio Frequency Magnetron Sputtering

    New search for: Huang, J.
    New search for: Tang, K.
    New search for: Yang, H.M.
    New search for: Lin, M.A.
    New search for: Zhang, L.
    New search for: Ren, B.
    New search for: Xu, H.T.
    New search for: Wang, L.J.
    New search for: Pan, W.
    New search for: Gong, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Growth of AlN Films on Silicon Substrates by Radio Frequency Magnetron Sputtering

    New search for: Huang, J.
    New search for: Tang, K.
    New search for: Yang, H.M.
    New search for: Lin, M.A.
    New search for: Zhang, L.
    New search for: Ren, B.
    New search for: Xu, H.T.
    New search for: Wang, L.J.
    New search for: Pan, W.
    New search for: Gong, J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Growth of AlN Films on Silicon Substrates by Radio Frequency Magnetron Sputtering

    Contributors:

    Huang, J. (author) / Tang, K. (author) / Yang, H.M. (author) / Lin, M.A. (author) / Zhang, L. (author) / Ren, B. (author) / Xu, H.T. (author) / Wang, L.J. (author) / Pan, W. / Gong, J.

    Published in:

    High-Performance Ceramics VIII ; 574-577

    KEY ENGINEERING MATERIALS ; 602/603

    Publication date:

    2014-01-01

    Size:

    4 pages

    ISSN:

    1013-9826

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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