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    Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

    New search for: Mattila, P.
    New search for: Bosund, M.
    New search for: Jussila, H.
    New search for: Aierken, A.
    New search for: Riikonen, J.
    New search for: Huhtio, T.
    New search for: Lipsanen, H.
    New search for: Sopanen, M.

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    Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

    New search for: Mattila, P.
    New search for: Bosund, M.
    New search for: Jussila, H.
    New search for: Aierken, A.
    New search for: Riikonen, J.
    New search for: Huhtio, T.
    New search for: Lipsanen, H.
    New search for: Sopanen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

    New search for: Mattila, P.
    New search for: Bosund, M.
    New search for: Jussila, H.
    New search for: Aierken, A.
    New search for: Riikonen, J.
    New search for: Huhtio, T.
    New search for: Lipsanen, H.
    New search for: Sopanen, M.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Check availability in my library
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    Document information
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    Document information
    Title:

    Properties of atomic-layer-deposited ultra-thin AlN films on GaAs surfaces

    Contributors:

    Mattila, P. (author) / Bosund, M. (author) / Jussila, H. (author) / Aierken, A. (author) / Riikonen, J. (author) / Huhtio, T. (author) / Lipsanen, H. (author) / Sopanen, M. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 314 ; 570-574

    Publication date:

    2014-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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