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The Study of SiC Thin Films Produced by Magnetron Sputtering

Lai, L. / Wang, X.J. / Hao, J.J.

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The Study of SiC Thin Films Produced by Magnetron Sputtering

Lai, L. / Wang, X.J. / Hao, J.J.

The Study of SiC Thin Films Produced by Magnetron Sputtering

Lai, L. / Wang, X.J. / Hao, J.J.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

The Study of SiC Thin Films Produced by Magnetron Sputtering

Contributors:

Lai, L. (author) / Wang, X.J. (author) / Hao, J.J. (author)

Published in:

KEY ENGINEERING MATERIALS ; 609/610 ; 82-87

Publication date:

2014-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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