Fabrication and Characteristics of Silicon Bridge Magnetic Sensor Based on Cantilever Beam: Fid-Bau Portal

Fabrication and Characteristics of Silicon Bridge Magnetic Sensor Based on Cantilever Beam

Li, L. / Zhao, X.F. / Yu, Y. / Wen, D.Z. / Cao, J.Y. / Tian, L.

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Fabrication and Characteristics of Silicon Bridge Magnetic Sensor Based on Cantilever Beam

Li, L. / Zhao, X.F. / Yu, Y. / Wen, D.Z. / Cao, J.Y. / Tian, L.

Fabrication and Characteristics of Silicon Bridge Magnetic Sensor Based on Cantilever Beam

Li, L. / Zhao, X.F. / Yu, Y. / Wen, D.Z. / Cao, J.Y. / Tian, L.

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Check availability in my library

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Document information

Title:

Fabrication and Characteristics of Silicon Bridge Magnetic Sensor Based on Cantilever Beam

Contributors:

Li, L. (author) / Zhao, X.F. (author) / Yu, Y. (author) / Wen, D.Z. (author) / Cao, J.Y. (author) / Tian, L. (author) / Tang, F.

Published in:

MICRO-NANO TECHNOLOGY XV ; 1088-1093

KEY ENGINEERING MATERIALS ; 609/610

Publication date:

2014-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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