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Analysis of a 3-DOF Micro-Positioning Stage
Analysis of a 3-DOF Micro-Positioning Stage
Analysis of a 3-DOF Micro-Positioning Stage
Zhai, D.D. (author) / Fan, S.X. (author) / Fan, D.P. (author) / Guanglin, W. / Huifeng, W. / Xiang, Z. / Yuefeng, L. / Chengcheng, L. / Nan, Y.
2014-01-01
6 pages
Article (Journal)
English
DDC:
620.11
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