Influence of Sputtering Power and Annealing on the Ga-doped ZnO Films by Magnetron Sputtering: Fid-Bau Portal

Influence of Sputtering Power and Annealing on the Ga-doped ZnO Films by Magnetron Sputtering

Li, X. / Chen, L.-x. / Lu, J.-g. / Ye, Z.-z.

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Influence of Sputtering Power and Annealing on the Ga-doped ZnO Films by Magnetron Sputtering

Li, X. / Chen, L.-x. / Lu, J.-g. / Ye, Z.-z.

Influence of Sputtering Power and Annealing on the Ga-doped ZnO Films by Magnetron Sputtering

Li, X. / Chen, L.-x. / Lu, J.-g. / Ye, Z.-z.

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Order at Subito €

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Document information

Title:

Influence of Sputtering Power and Annealing on the Ga-doped ZnO Films by Magnetron Sputtering

Contributors:

Li, X. (author) / Chen, L.-x. (author) / Lu, J.-g. (author) / Ye, Z.-z. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING -HANGZHOU- ; 32 ; 845-847

Publication date:

2014-01-01

Size:

3 pages

ISSN:

1673-2812

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11

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