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    Annealing effect in structural and electrical properties of sputtered Mo thin film

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    Annealing effect in structural and electrical properties of sputtered Mo thin film

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    Annealing effect in structural and electrical properties of sputtered Mo thin film

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    Document information
    Title:

    Annealing effect in structural and electrical properties of sputtered Mo thin film

    Published in:

    APPLIED SURFACE SCIENCE ; 334 ; 129-137

    Publication date:

    2015-01-01

    Size:

    9 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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