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Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate
Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate
Nanotribological, nanomechanical and interfacial characterization of atomic layer deposited TiO2 on a silicon substrate
Lyytinen, J. (author) / Liu, X. (author) / Ylivaara, O. M. (author) / Sintonen, S. (author) / Iyer, A. (author) / Ali, S. (author) / Julin, J. (author) / Lipsanen, H. (author) / Sajavaara, T. (author) / Puurunen, R. L. (author)
WEAR -LAUSANNE- ; 342 ; 270-278
2015-01-01
9 pages
Article (Journal)
English
DDC:
620.11292
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