Microstructure and property of diamond-like carbon films with Al and Cr co-doping deposited using a hybrid beams system: Fid-Bau Portal

Microstructure and property of diamond-like carbon films with Al and Cr co-doping deposited using a hybrid beams system

Dai, W. / Liu, J. / Geng, D. / Guo, P. / Zheng, J. / Wang, Q.

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Microstructure and property of diamond-like carbon films with Al and Cr co-doping deposited using a hybrid beams system

Dai, W. / Liu, J. / Geng, D. / Guo, P. / Zheng, J. / Wang, Q.

Microstructure and property of diamond-like carbon films with Al and Cr co-doping deposited using a hybrid beams system

Dai, W. / Liu, J. / Geng, D. / Guo, P. / Zheng, J. / Wang, Q.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Microstructure and property of diamond-like carbon films with Al and Cr co-doping deposited using a hybrid beams system

Contributors:

Dai, W. (author) / Liu, J. (author) / Geng, D. (author) / Guo, P. (author) / Zheng, J. (author) / Wang, Q. (author)

Published in:

APPLIED SURFACE SCIENCE ; 388 ; 503-509

Publication date:

2016-01-01

Size:

7 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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