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Integration of SiC-1D nanostructures into nano-field effect transistors
Integration of SiC-1D nanostructures into nano-field effect transistors
Integration of SiC-1D nanostructures into nano-field effect transistors
Ollivier, M. (author) / Latu-Romain, L. (author) / Salem, B. (author) / Fradetal, L. (author) / Brouzet, V. (author) / Choi, J.-H. (author) / Bano, E. (author)
Materials science in semiconductor processing ; 29 ; 218-222
2015-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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