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Fracture toughness of silicon in nanometer-scale singular stress field
Fracture toughness of silicon in nanometer-scale singular stress field
Fracture toughness of silicon in nanometer-scale singular stress field
Sumigawa, Takashi (author) / Ashida, Shinsaku (author) / Tanaka, Shuhei (author) / Sanada, Kazunori (author) / Kitamura, Takayuki (author)
Engineering fracture mechanics ; 150 ; 161-167
2015-01-01
7 pages
Article (Journal)
English
DDC:
620.112605
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