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Structural and electrical characterization of platinum (~15at%) doped nickel silicides on Si(100) and SiGe/Si(100) substrates
Structural and electrical characterization of platinum (~15at%) doped nickel silicides on Si(100) and SiGe/Si(100) substrates
Structural and electrical characterization of platinum (~15at%) doped nickel silicides on Si(100) and SiGe/Si(100) substrates
Faheem, Mohammad (author) / Kumar, Aditya (author) / Liang, Yifan (author) / Heide, Paul van Der (author)
Materials science in semiconductor processing ; 44 ; 8-12
2016-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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