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Optimization of N2/Ar gas flow ratio for the realization of nitrogen-doped p-type ZnCdO thin films synthesized by RF magnetron sputtering
Optimization of N2/Ar gas flow ratio for the realization of nitrogen-doped p-type ZnCdO thin films synthesized by RF magnetron sputtering
Optimization of N2/Ar gas flow ratio for the realization of nitrogen-doped p-type ZnCdO thin films synthesized by RF magnetron sputtering
Song, Yanping (author) / Sui, Yingrui (author) / Hua, Zhong (author) / Wu, Yanjie (author) / Zhang, Yu (author) / Wang, Zhanwu (author) / Lv, Shiquan (author)
Materials science in semiconductor processing ; 61 ; 57-62
2017-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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