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Thermal stability of ZnO thin films fabricated by pulsed laser deposition
Thermal stability of ZnO thin films fabricated by pulsed laser deposition
Thermal stability of ZnO thin films fabricated by pulsed laser deposition
Vakulov, Z.E. (author) / Zamburg, E.G. (author) / Khakhulin, D.A. (author) / Ageev, O.A. (author)
Materials science in semiconductor processing ; 66 ; 21-25
2017-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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