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Atomistic simulations of focused ion beam machining of strained silicon
Atomistic simulations of focused ion beam machining of strained silicon
Atomistic simulations of focused ion beam machining of strained silicon
Guénolé, J. (author) / Prakash, A. (author) / Bitzek, E. (author)
Applied surface science ; 416 ; 86-95
2017-01-01
10 pages
Article (Journal)
English
DDC:
620.44
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