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(101) and (002) oriented AlN thin films deposited by sputtering
(101) and (002) oriented AlN thin films deposited by sputtering
(101) and (002) oriented AlN thin films deposited by sputtering
Taurino, A. (author) / Signore, M.A. (author) / Catalano, M. (author) / Kim, M.J. (author)
MATERIALS LETTERS ; 200 ; 18-20
2017-01-01
3 pages
Article (Journal)
Unknown
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