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Massive fabrication of silicon nanopore arrays with tunable shapes
Massive fabrication of silicon nanopore arrays with tunable shapes
Massive fabrication of silicon nanopore arrays with tunable shapes
Deng, Tao (author) / Wang, Yifan (author) / Chen, Qi (author) / Chen, Houjin (author) / Liu, Zewen (author)
Applied surface science ; 390 ; 681-688
2016-01-01
8 pages
Article (Journal)
English
DDC:
620.44
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