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Effects of annealing treatment on the high temperature performance of 4H-SiC metal-semiconductor-metal ultraviolet photodiodes
Effects of annealing treatment on the high temperature performance of 4H-SiC metal-semiconductor-metal ultraviolet photodiodes
Effects of annealing treatment on the high temperature performance of 4H-SiC metal-semiconductor-metal ultraviolet photodiodes
Lu, Yi-feng (author) / He, Hong (author) / Liu, Shao-xiong (author) / Chen, Zhi-zhan (author)
Materials science in semiconductor processing ; 71 ; 116-120
2017-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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