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Site-controlled fabrication of silicon nanotips by indentation-induced selective etching
Site-controlled fabrication of silicon nanotips by indentation-induced selective etching
Site-controlled fabrication of silicon nanotips by indentation-induced selective etching
Jin, Chenning (author) / Yu, Bingjun (author) / Liu, Xiaoxiao (author) / Xiao, Chen (author) / Wang, Hongbo (author) / Jiang, Shulan (author) / Wu, Jiang (author) / Liu, Huiyun (author) / Qian, Linmao (author)
Applied surface science ; 425 ; 227-232
2017-01-01
6 pages
Article (Journal)
English
DDC:
620.44
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