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Fully coherent Ge islands growth on Si nano-pillars by selective epitaxy

Yamamoto, Yuji / Zaumseil, Peter / Schubert, Markus Andreas / Capellini, Giovanni / Salvalaglio, Marco / Montalenti, F. / Schroeder, Thomas / Tillack, Bernd

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Fully coherent Ge islands growth on Si nano-pillars by selective epitaxy

Yamamoto, Yuji / Zaumseil, Peter / Schubert, Markus Andreas / Capellini, Giovanni / Salvalaglio, Marco / Montalenti, F. / Schroeder, Thomas / Tillack, Bernd

Fully coherent Ge islands growth on Si nano-pillars by selective epitaxy

Yamamoto, Yuji / Zaumseil, Peter / Schubert, Markus Andreas / Capellini, Giovanni / Salvalaglio, Marco / Montalenti, F. / Schroeder, Thomas / Tillack, Bernd

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Title:

Fully coherent Ge islands growth on Si nano-pillars by selective epitaxy

Contributors:

Yamamoto, Yuji (author) / Zaumseil, Peter (author) / Schubert, Markus Andreas (author) / Capellini, Giovanni (author) / Salvalaglio, Marco (author) / Montalenti, F. (author) / Schroeder, Thomas (author) / Tillack, Bernd (author)

Published in:

Materials science in semiconductor processing ; 70 ; 30-37

Publication date:

2017-01-01

Size:

8 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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