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Epitaxial growth of Ge thin film on Si (001) by DC magnetron sputtering

Otsuka, Shintaro / Mori, Takahiro / Morita, Yukinori / Uchida, Noriyuki / Liu, Yongxun / O'uchi, Shin-ichi / Fuketa, Hiroshi / Migita, Shinji / Masahara, Meishoku / Matsukawa, Takashi

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Epitaxial growth of Ge thin film on Si (001) by DC magnetron sputtering

Otsuka, Shintaro / Mori, Takahiro / Morita, Yukinori / Uchida, Noriyuki / Liu, Yongxun / O'uchi, Shin-ichi / Fuketa, Hiroshi / Migita, Shinji / Masahara, Meishoku / Matsukawa, Takashi

Epitaxial growth of Ge thin film on Si (001) by DC magnetron sputtering

Otsuka, Shintaro / Mori, Takahiro / Morita, Yukinori / Uchida, Noriyuki / Liu, Yongxun / O'uchi, Shin-ichi / Fuketa, Hiroshi / Migita, Shinji / Masahara, Meishoku / Matsukawa, Takashi

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Title:

Epitaxial growth of Ge thin film on Si (001) by DC magnetron sputtering

Contributors:

Otsuka, Shintaro (author) / Mori, Takahiro (author) / Morita, Yukinori (author) / Uchida, Noriyuki (author) / Liu, Yongxun (author) / O'uchi, Shin-ichi (author) / Fuketa, Hiroshi (author) / Migita, Shinji (author) / Masahara, Meishoku (author) / Matsukawa, Takashi (author)

Published in:

Materials science in semiconductor processing ; 70 ; 3-7

Publication date:

2017-01-01

Size:

5 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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