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Structural analysis of polycrystalline silicon thin films produced by two different ICPCVD approaches
Structural analysis of polycrystalline silicon thin films produced by two different ICPCVD approaches
Structural analysis of polycrystalline silicon thin films produced by two different ICPCVD approaches
Li, Zhongli (author) / Letha, Ayra Jagadhamma (author) / Wei, Jia-Fu (author) / Lu, Man-Ling (author) / Liu, Yijian (author) / Hwang, Huey-Liang (author) / Zhang, Yafei (author)
Materials science in semiconductor processing ; 75 ; 51-57
2018-01-01
7 pages
Article (Journal)
English
DDC:
621.38152
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