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RF plasma enhanced MOCVD of yttria stabilized zirconia thin films using octanedionate precursors and their characterization

Chopade, S.S. / Nayak, C. / Bhattacharyya, D. / Jha, S.N. / Tokas, R.B. / Sahoo, N.K. / Deo, M.N. / Biswas, A. / Rai, Sanjay / Thulasi Raman, K.H. / ... [more]

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RF plasma enhanced MOCVD of yttria stabilized zirconia thin films using octanedionate precursors and their characterization

Chopade, S.S. / Nayak, C. / Bhattacharyya, D. / Jha, S.N. / Tokas, R.B. / Sahoo, N.K. / Deo, M.N. / Biswas, A. / Rai, Sanjay / Thulasi Raman, K.H. / ... [more]

RF plasma enhanced MOCVD of yttria stabilized zirconia thin films using octanedionate precursors and their characterization

Chopade, S.S. / Nayak, C. / Bhattacharyya, D. / Jha, S.N. / Tokas, R.B. / Sahoo, N.K. / Deo, M.N. / Biswas, A. / Rai, Sanjay / Thulasi Raman, K.H. / ... [more]

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Title:

RF plasma enhanced MOCVD of yttria stabilized zirconia thin films using octanedionate precursors and their characterization

Contributors:

Chopade, S.S. (author) / Nayak, C. (author) / Bhattacharyya, D. (author) / Jha, S.N. (author) / Tokas, R.B. (author) / Sahoo, N.K. (author) / Deo, M.N. (author) / Biswas, A. (author) / Rai, Sanjay (author) / Thulasi Raman, K.H. (author)

Published in:

Applied surface science ; 355 ; 82-92

Publication date:

2015-01-01

Size:

11 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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