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    Use of a nanostructured surface coating to achieve higher sputter rates

    New search for: Flege, S.
    New search for: Hatada, R.
    New search for: Kaiser, T.
    New search for: Muench, F.
    New search for: Cherkashinin, G.
    New search for: Schwöbel, A.
    New search for: Ensinger, W.
    New search for: Baba, K.

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    Use of a nanostructured surface coating to achieve higher sputter rates

    New search for: Flege, S.
    New search for: Hatada, R.
    New search for: Kaiser, T.
    New search for: Muench, F.
    New search for: Cherkashinin, G.
    New search for: Schwöbel, A.
    New search for: Ensinger, W.
    New search for: Baba, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Use of a nanostructured surface coating to achieve higher sputter rates

    New search for: Flege, S.
    New search for: Hatada, R.
    New search for: Kaiser, T.
    New search for: Muench, F.
    New search for: Cherkashinin, G.
    New search for: Schwöbel, A.
    New search for: Ensinger, W.
    New search for: Baba, K.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
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    Document information
    Title:

    Use of a nanostructured surface coating to achieve higher sputter rates

    Contributors:

    Flege, S. (author) / Hatada, R. (author) / Kaiser, T. (author) / Muench, F. (author) / Cherkashinin, G. (author) / Schwöbel, A. (author) / Ensinger, W. (author) / Baba, K. (author)

    Published in:

    MATERIALS LETTERS ; 164 ; 532-534

    Publication date:

    2016-01-01

    Size:

    3 pages

    ISSN:

    0167-577X

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    Unknown

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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