Low temperature thermal ALD TaNx and TiNx films from anhydrous N2H4: Fid-Bau Portal

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Low temperature thermal ALD TaNx and TiNx films from anhydrous N2H4

Wolf, Steven / Breeden, Michael / Kwak, Iljo / Park, Jun H. / Kavrik, Mahmut / Naik, Mehul / Alvarez, Daniel / Spiegelman, Jeffrey / Kummel, Andrew C.

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Low temperature thermal ALD TaNx and TiNx films from anhydrous N2H4

Wolf, Steven / Breeden, Michael / Kwak, Iljo / Park, Jun H. / Kavrik, Mahmut / Naik, Mehul / Alvarez, Daniel / Spiegelman, Jeffrey / Kummel, Andrew C.

Low temperature thermal ALD TaNx and TiNx films from anhydrous N2H4

Wolf, Steven / Breeden, Michael / Kwak, Iljo / Park, Jun H. / Kavrik, Mahmut / Naik, Mehul / Alvarez, Daniel / Spiegelman, Jeffrey / Kummel, Andrew C.

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Order at Subito €

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Document information

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Document information

Title:

Low temperature thermal ALD TaNx and TiNx films from anhydrous N2H4

Contributors:

Wolf, Steven (author) / Breeden, Michael (author) / Kwak, Iljo (author) / Park, Jun H. (author) / Kavrik, Mahmut (author) / Naik, Mehul (author) / Alvarez, Daniel (author) / Spiegelman, Jeffrey (author) / Kummel, Andrew C. (author)

Published in:

Applied surface science ; 462 ; 1029-1035

Publication date:

2018-01-01

Size:

7 pages

ISSN:

Type of media:

Article (Journal)

Type of material:

Print

Language:

English

Classification:

© Metadata Copyright the British Library Board and other contributors. All rights reserved.

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