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Surface electrical characterization of defect related inhomogeneities of AlGaN/GaN/Si heterostructures using scanning capacitance microscopy
Surface electrical characterization of defect related inhomogeneities of AlGaN/GaN/Si heterostructures using scanning capacitance microscopy
Surface electrical characterization of defect related inhomogeneities of AlGaN/GaN/Si heterostructures using scanning capacitance microscopy
Szyszka, Adam (author) / Wośko, Mateusz (author) / Paszkiewicz, Bogdan (author) / Paszkiewicz, Regina (author)
Materials science in semiconductor processing ; 94 ; 57-63
2019-01-01
7 pages
Article (Journal)
English
DDC:
621.38152
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