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Application of inertial micromachined (MEMS) sensors for precision displacement measurement
Application of inertial micromachined (MEMS) sensors for precision displacement measurement
Application of inertial micromachined (MEMS) sensors for precision displacement measurement
Spiewak, S. A. (author)
International journal of material & product technology ; 18 ; 408-430
2003-01-01
23 pages
Article (Journal)
English
DDC:
620.11
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