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A novel approach to construct self-assembled 3D MEMS arrays
A novel approach to construct self-assembled 3D MEMS arrays
A novel approach to construct self-assembled 3D MEMS arrays
Akhundzada, Sapida (author) / Yang, Xiaohui (author) / Fiedler, Johannes (author) / Käkel, Eireen (author) / Al-Qargholi, Basim (author) / Buhmann, Stefan (author) / Ehresmann, Arno (author) / Hillmer, Hartmut (author) / Universität Kassel (host institution)
2022
Miscellaneous
Electronic Resource
English
600 , Array , MEMS , 3D-Technologie , Hohlzylinder
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