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Influence of thermal annealing and of the substrate on sputter-deposited thin films from EUROFER97 on tungsten
The modification of sputter-deposited films from EUROFER97 on tungsten during and after annealing were investigated in-situ and ex-situ. The annealing resulted in a densification of the film, formation of large grains, segregation of W at the surface, and the formation of Fe-W compounds at the interfacial region. Similar structural modifications were observed also for a film annealed on a MgO substrate, with an exception to the change in composition (no increase of W concentration). Results indicate that the substrate significantly affects thermally induced modifications of re-deposited EUROFER97.
Influence of thermal annealing and of the substrate on sputter-deposited thin films from EUROFER97 on tungsten
The modification of sputter-deposited films from EUROFER97 on tungsten during and after annealing were investigated in-situ and ex-situ. The annealing resulted in a densification of the film, formation of large grains, segregation of W at the surface, and the formation of Fe-W compounds at the interfacial region. Similar structural modifications were observed also for a film annealed on a MgO substrate, with an exception to the change in composition (no increase of W concentration). Results indicate that the substrate significantly affects thermally induced modifications of re-deposited EUROFER97.
Influence of thermal annealing and of the substrate on sputter-deposited thin films from EUROFER97 on tungsten
E. Pitthan (author) / T.T. Tran (author) / D. Moldarev (author) / M. Rubel (author) / D. Primetzhofer (author)
2023
Article (Journal)
Electronic Resource
Unknown
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