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Growth process of nano-tendril bundles with sputtered tungsten
Nano-tendril bundles (NTBs) were generated in DC He plasma with impurity gas-seeding (Ne and N2) under sputtering-dominated conditions. NTB morphologies were characterized using the net erosion yield of samples. NTBs’ height and area were analyzed and ion fluence dependence was discussed. For both impurities, the number of NTBs increased steadily with increasing the fluence. It was revealed that NTB can be generated newly and continuously regardless of ion fluence. Surface observations suggested that micro-protrusions can evolve into NTBs. The effect of re-deposition of W was discussed based on SEM observations. Line-of-sight deposition seemed to play a key role of W feeder to enable NTBs to grow greater. Keywords: Fuzz, Helium, Impurity seeding, Sputtering, Deposition, Tungsten
Growth process of nano-tendril bundles with sputtered tungsten
Nano-tendril bundles (NTBs) were generated in DC He plasma with impurity gas-seeding (Ne and N2) under sputtering-dominated conditions. NTB morphologies were characterized using the net erosion yield of samples. NTBs’ height and area were analyzed and ion fluence dependence was discussed. For both impurities, the number of NTBs increased steadily with increasing the fluence. It was revealed that NTB can be generated newly and continuously regardless of ion fluence. Surface observations suggested that micro-protrusions can evolve into NTBs. The effect of re-deposition of W was discussed based on SEM observations. Line-of-sight deposition seemed to play a key role of W feeder to enable NTBs to grow greater. Keywords: Fuzz, Helium, Impurity seeding, Sputtering, Deposition, Tungsten
Growth process of nano-tendril bundles with sputtered tungsten
Dogyun Hwangbo (author) / Shin Kajita (author) / Hirohiko Tanaka (author) / Noriyasu Ohno (author)
2019
Article (Journal)
Electronic Resource
Unknown
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