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Microstructure and tribological performance of CNx–TiNx composite films prepared by pulsed laser deposition
AbstractCNx–TiNx composite films were prepared on high-speed steel (HSS) substrate by pulsed KrF excimer laser co-deposition process with graphite/Ti combined targets and a substrate temperature of 200°C. The composition, morphology and microstructure of the films were characterized by energy dispersive X-ray spectrum (EDS), scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and high-resolution transmission electron microscopy (HRTEM). The adhesion and tribological performance of the films were investigated using a conventional scratch tester and a ball-on-disk tribometer, respectively. In the graphite/Ti range of 0.5–2.0 of the target, TiNx, a-CNx and metallic Ti phase were found in the composite films. The TiNx disappeared in the films at a high graphite/Ti ratio of the target. With increasing the graphite/Ti ratio of the target, the adhesion to substrate of the composite films deteriorated from 46N to 26N, and the friction coefficient decreased from 0.23 to 0.17. The composite film deposited at the graphite/Ti ratio of 1.0 showed a low friction coefficient, good adhesion and wear rate of 3.2×10−7mm3/Nm in humid air.
Microstructure and tribological performance of CNx–TiNx composite films prepared by pulsed laser deposition
AbstractCNx–TiNx composite films were prepared on high-speed steel (HSS) substrate by pulsed KrF excimer laser co-deposition process with graphite/Ti combined targets and a substrate temperature of 200°C. The composition, morphology and microstructure of the films were characterized by energy dispersive X-ray spectrum (EDS), scanning electron microscopy (SEM), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and high-resolution transmission electron microscopy (HRTEM). The adhesion and tribological performance of the films were investigated using a conventional scratch tester and a ball-on-disk tribometer, respectively. In the graphite/Ti range of 0.5–2.0 of the target, TiNx, a-CNx and metallic Ti phase were found in the composite films. The TiNx disappeared in the films at a high graphite/Ti ratio of the target. With increasing the graphite/Ti ratio of the target, the adhesion to substrate of the composite films deteriorated from 46N to 26N, and the friction coefficient decreased from 0.23 to 0.17. The composite film deposited at the graphite/Ti ratio of 1.0 showed a low friction coefficient, good adhesion and wear rate of 3.2×10−7mm3/Nm in humid air.
Microstructure and tribological performance of CNx–TiNx composite films prepared by pulsed laser deposition
Zheng, X.H. (author) / Tu, J.P. (author) / Song, R.G. (author)
2009-01-30
4 pages
Article (Journal)
Electronic Resource
English
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