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Making method of heavy gauge aluminum nitride ceramic substrate
The invention relates to the technical field of aluminum nitride ceramic substrates, and provides a making method of a 8-10 inch non-deformable heavy gauge aluminum nitride ceramic substrate. The deformation of the aluminum nitride substrate is reduced by controlling a liquid phase and increasing the density of a formed body. The method comprises the steps of preparing a Y3Al5O12 sintering aid additive, preparing a tape casting slurry, preparing a tape casting green body, and making the ceramic substrate. The Y3Al5O12 sintering aid additive is prepared through high temperature calcining of Al2O3 powder and Y2O3 powder at 1760-1850DEG C, a CaF2 auxiliary additive is prepared in the preparation process of the tape casting slurry, the high density green body is obtained through combining tape casting molding with isostatic molding in the preparation process of the tape casting green body, and the ceramic substrate is made through carrying out high temperature sintering at 1860-1930DEG C for 1-4h.
Making method of heavy gauge aluminum nitride ceramic substrate
The invention relates to the technical field of aluminum nitride ceramic substrates, and provides a making method of a 8-10 inch non-deformable heavy gauge aluminum nitride ceramic substrate. The deformation of the aluminum nitride substrate is reduced by controlling a liquid phase and increasing the density of a formed body. The method comprises the steps of preparing a Y3Al5O12 sintering aid additive, preparing a tape casting slurry, preparing a tape casting green body, and making the ceramic substrate. The Y3Al5O12 sintering aid additive is prepared through high temperature calcining of Al2O3 powder and Y2O3 powder at 1760-1850DEG C, a CaF2 auxiliary additive is prepared in the preparation process of the tape casting slurry, the high density green body is obtained through combining tape casting molding with isostatic molding in the preparation process of the tape casting green body, and the ceramic substrate is made through carrying out high temperature sintering at 1860-1930DEG C for 1-4h.
Making method of heavy gauge aluminum nitride ceramic substrate
YANG DASHENG (author) / SHI CHUNXI (author)
2015-08-19
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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