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Method for preparing rutile titanium dioxide nano-film by virtue of sol-gel method
The invention relates to a method for preparing a rutile titanium dioxide nano-film by virtue of a sol-gel method, belonging to the technical field of film preparation. The method comprises the following steps: firstly preparing a precursor solution by taking tetrabutyl titanate (Ti(OBu)4) as a solute and taking mixed liquid of monoethanal amine, glycol methyl ether and acetone as a solvent, wherein the concentration of tetrabutyl titanate in the precursor solution is 0.1mol/L-1mol/L, and the volume ratio of monoethanal amine to glycol methyl ether to acetone is 1 to 1 to 0.5; adding acetylacetone as a chelating agent and glycerol as a thickening agent, and stirring, so as to obtain transparent and uniform sol; finally carrying out spin coating and high-temperature sintering, so as to obtain the rutile titanium dioxide nano-film on a silicon wafer. The method has the advantages that the cost is low, the process is simple, the repeatability is good, and the mass manufacturing can be realized.
Method for preparing rutile titanium dioxide nano-film by virtue of sol-gel method
The invention relates to a method for preparing a rutile titanium dioxide nano-film by virtue of a sol-gel method, belonging to the technical field of film preparation. The method comprises the following steps: firstly preparing a precursor solution by taking tetrabutyl titanate (Ti(OBu)4) as a solute and taking mixed liquid of monoethanal amine, glycol methyl ether and acetone as a solvent, wherein the concentration of tetrabutyl titanate in the precursor solution is 0.1mol/L-1mol/L, and the volume ratio of monoethanal amine to glycol methyl ether to acetone is 1 to 1 to 0.5; adding acetylacetone as a chelating agent and glycerol as a thickening agent, and stirring, so as to obtain transparent and uniform sol; finally carrying out spin coating and high-temperature sintering, so as to obtain the rutile titanium dioxide nano-film on a silicon wafer. The method has the advantages that the cost is low, the process is simple, the repeatability is good, and the mass manufacturing can be realized.
Method for preparing rutile titanium dioxide nano-film by virtue of sol-gel method
LIAO YULONG (author) / WANG XIAOYI (author) / ZHANG HUAIWU (author) / ZHONG ZHIYONG (author) / WEN TIANLONG (author) / YANG QINGHUI (author)
2015-12-23
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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