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Preparation method for a large-area single-layer or few-layer molybdenum disulfide film
The invention discloses a preparation method for a large-area single-layer or few-layer molybdenum disulfide film. The main steps of the preparation method are as follows: firstly, sulfur powder and molybdenum trioxide powder are placed in two quartz boats respectively, a substrate is placed on the quartz boat loaded with molybdenum trioxide powder, and the obverse surface faces downwards; secondly, the two quartz boats loaded with sulfur powder and molybdenum trioxide powder are placed at a bottom end and an orifice of a quartz test tube respectively; thirdly, the above quartz test tube is placed in a tubular furnace, the bottom end and the orifice of the test tube are located at the edge area and the central area of the tubular furnace respectively; fourthly, protection gas argon or nitrogen is inputted into the tubular furnace, a normal pressure is kept until the experiment is over; fifthly, the tubular furnace is heated at a certain heating speed, thus the edge area and the central area of the tubular furnace are in proper temperatures respectively, the temperatures are kept for some time, sulfur powder sublimates and reacts with gas phase molybdenum trioxide, and a large-area single-layer or few-layer molybdenum disulfide film is generated on the substrate; sixthly, the tubular furnace is cooled to the room temperature, and the preparation process is finished. The method is slightly affected by air flow, the repetition rate is high, preparation of high-quality large-area single-layer or few-layer molybdenum disulfide film can be achieved at a normal pressure.
Preparation method for a large-area single-layer or few-layer molybdenum disulfide film
The invention discloses a preparation method for a large-area single-layer or few-layer molybdenum disulfide film. The main steps of the preparation method are as follows: firstly, sulfur powder and molybdenum trioxide powder are placed in two quartz boats respectively, a substrate is placed on the quartz boat loaded with molybdenum trioxide powder, and the obverse surface faces downwards; secondly, the two quartz boats loaded with sulfur powder and molybdenum trioxide powder are placed at a bottom end and an orifice of a quartz test tube respectively; thirdly, the above quartz test tube is placed in a tubular furnace, the bottom end and the orifice of the test tube are located at the edge area and the central area of the tubular furnace respectively; fourthly, protection gas argon or nitrogen is inputted into the tubular furnace, a normal pressure is kept until the experiment is over; fifthly, the tubular furnace is heated at a certain heating speed, thus the edge area and the central area of the tubular furnace are in proper temperatures respectively, the temperatures are kept for some time, sulfur powder sublimates and reacts with gas phase molybdenum trioxide, and a large-area single-layer or few-layer molybdenum disulfide film is generated on the substrate; sixthly, the tubular furnace is cooled to the room temperature, and the preparation process is finished. The method is slightly affected by air flow, the repetition rate is high, preparation of high-quality large-area single-layer or few-layer molybdenum disulfide film can be achieved at a normal pressure.
Preparation method for a large-area single-layer or few-layer molybdenum disulfide film
WANG JINBIN (author) / XIAO JUNLIN (author) / ZHONG XIANGLI (author) / TIAN ZIRAN (author) / LI BO (author)
2016-01-27
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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