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Setter plate applied to low-temperature co-sintering ceramic sintering
The invention provides a setter plate applied to low-temperature co-sintering ceramic sintering. The setter plate is characterized in that the setter plate is a quasi flat plate with a cavity structure and utilizes high-temperature ceramic formation; the specific implementation method comprises a conventional multilayer ceramic manufacturing process and a conventional blanking and grinding process; the surface roughness is lower than 1.6, the surface evenness is smaller than 15 microns and the upper-lower flatness is lower than 1 degree; the existing types of low-temperature co-sintering ceramic sintering can be met. The invention has the beneficial effects that the manufacturing cycle of the setter plate is simple and short, the service cycle is long, the setter plate resists corrosion, oxidization and adhesion, is low in cost and does not sinter with low-temperature co-sintering ceramic, and the evenness of the sintered low-temperature co-sintering ceramic is smaller than 1 micron per millimeter and meets a 0.10 mm feeler gauge test; the manufacturing process of the low-temperature co-sintering ceramic is simplified, the package process of the low-temperature co-sintering ceramic is effectively improved, the electrical performance of required devices is optimized, and the setter plate can be widely applied to the low-temperature co-sintering ceramic sintering process.
Setter plate applied to low-temperature co-sintering ceramic sintering
The invention provides a setter plate applied to low-temperature co-sintering ceramic sintering. The setter plate is characterized in that the setter plate is a quasi flat plate with a cavity structure and utilizes high-temperature ceramic formation; the specific implementation method comprises a conventional multilayer ceramic manufacturing process and a conventional blanking and grinding process; the surface roughness is lower than 1.6, the surface evenness is smaller than 15 microns and the upper-lower flatness is lower than 1 degree; the existing types of low-temperature co-sintering ceramic sintering can be met. The invention has the beneficial effects that the manufacturing cycle of the setter plate is simple and short, the service cycle is long, the setter plate resists corrosion, oxidization and adhesion, is low in cost and does not sinter with low-temperature co-sintering ceramic, and the evenness of the sintered low-temperature co-sintering ceramic is smaller than 1 micron per millimeter and meets a 0.10 mm feeler gauge test; the manufacturing process of the low-temperature co-sintering ceramic is simplified, the package process of the low-temperature co-sintering ceramic is effectively improved, the electrical performance of required devices is optimized, and the setter plate can be widely applied to the low-temperature co-sintering ceramic sintering process.
Setter plate applied to low-temperature co-sintering ceramic sintering
DAI LEI (author) / CAO CHANGSHENG (author) / PANG XUEMAN (author) / ZHANG KUI (author)
2016-02-17
Patent
Electronic Resource
English
IPC:
C04B
Kalk
,
LIME
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