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Sintering method for tubular rotary ceramic target material
The invention discloses a sintering method for a tubular rotary ceramic target material. The tubular rotary ceramic target material green body is placed on a sintering bearing plate provided with a sliding surface for sintering, the friction force when the target material is densified and contracted is reduced, the deformation or serious cracking of the target material end in contact with the sintering bearing plate is effectively avoided, and the inclination angle of the sliding surface of the sintering bearing plate relative to the horizontal plane is 10-50 degrees, so that the friction force between the target material green body and the sintering bearing plate due to shrinkage during sintering can be greatly reduced, the densification of the target material is facilitated, the defectsof deformation, cracking and the like of the target material are prevented, and the yield of the target material is greatly improved.
本发明公开了一种管状旋转陶瓷靶材的烧结方法。本发明通过将管状旋转陶瓷靶材生坯置于设有滑移面的承烧板上进行烧结,降低靶材致密化收缩时的摩擦力,有效避免与承烧板接触的靶材端产生变形,或者较严重的开裂,且承烧板的滑移面相对于水平面的倾斜角为10°‑50°,可极大的降低靶材生坯在烧结时因收缩导致与承烧板的摩擦力,有利于靶材致密化及防止靶材产生变形、开裂等缺陷,极大的提高了靶材的良率。
Sintering method for tubular rotary ceramic target material
The invention discloses a sintering method for a tubular rotary ceramic target material. The tubular rotary ceramic target material green body is placed on a sintering bearing plate provided with a sliding surface for sintering, the friction force when the target material is densified and contracted is reduced, the deformation or serious cracking of the target material end in contact with the sintering bearing plate is effectively avoided, and the inclination angle of the sliding surface of the sintering bearing plate relative to the horizontal plane is 10-50 degrees, so that the friction force between the target material green body and the sintering bearing plate due to shrinkage during sintering can be greatly reduced, the densification of the target material is facilitated, the defectsof deformation, cracking and the like of the target material are prevented, and the yield of the target material is greatly improved.
本发明公开了一种管状旋转陶瓷靶材的烧结方法。本发明通过将管状旋转陶瓷靶材生坯置于设有滑移面的承烧板上进行烧结,降低靶材致密化收缩时的摩擦力,有效避免与承烧板接触的靶材端产生变形,或者较严重的开裂,且承烧板的滑移面相对于水平面的倾斜角为10°‑50°,可极大的降低靶材生坯在烧结时因收缩导致与承烧板的摩擦力,有利于靶材致密化及防止靶材产生变形、开裂等缺陷,极大的提高了靶材的良率。
Sintering method for tubular rotary ceramic target material
一种管状旋转陶瓷靶材的烧结方法
LEI YU (author) / XIAO SHIHONG (author) / ZHAO MINGZENG (author) / ZHOU ZHIHONG (author) / XU JIWEN (author) / YANG YONGTIAN (author) / ZHOU ZHAOYU (author) / ZHOU ZHAOYIN (author)
2020-04-17
Patent
Electronic Resource
Chinese
IPC:
F27D
Einzelheiten oder Zubehör für Industrieöfen, Schachtöfen, Brennöfen oder Retorten, soweit sie nicht auf eine Ofenart eingeschränkt sind
,
DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
/
C04B
Kalk
,
LIME
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